Ultrathin Mini environment equipment FAN FILTER UNIT EFU
Typical Applications
| Flat panel display |
Microelectronics |
| Semiconductor |
Pharma |
Product Overview
Ultrathin, Low noise
The casing thickness of EFU can be as low as 180mm, in combination with high strength casing and the structure specially designed which can effectively reduce disturbing flow, it can maximally reduce noise. Optional internal or ex-ternal flanging structure, easy installation, operation and maintenance.
Intelligent system control
EC EFU adopts remote control system, which can achieve Large-scale integrated control and meanwhile control each EFU individually, The system can also indicate the followings: operator logging, energy consumption analysis, diagnosis, error messages
Negligible off-gassing properties
All components adopted are low off-gassing material and are meticulously tested; for the casing, stainless steel, galvalume steel, SPCC or aluminum can be selected. Equipped with PTFE filters containing little Boron, Sodium, Potassium, Silicon or other element
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